Patent №
US 10,131,991
Granted
2018-11-20
Filed 2010
Owner
UCHICAGO ARGONNE, LLC
Lab
—
AI components
1
nlp
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
12895305
A method of preparing light transmitting conducting metal oxide (TCO) films using atomic layer deposition (ALD) of a metal precursor multiple oxidizing reactants. The multiple metal oxidizing reactants may be selected to enhance growth of the TCO film. In a particular embodiment, an indium oxide TCO film is prepared using a cyclopentadienyl indium precursor and a combination of water and oxygen.
AI classification
Natural language0.59
AI hardware0.01
Speech0.00
Machine learning0.00
Evolutionary computation0.00
Knowledge representation0.00
Vision0.00
Planning0.00
Ownership
UCHICAGO ARGONNE, LLC
assignment · 250800859
Assignors
ELAM, JEFFREY W., LIBERA, JOSEPH A.
On an employer assignment, the assignors are typically the inventors.
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