Semiconductor Package with Cavity

Patent №

US 10,410,940

Granted

2019-09-10

Filed 2017

Owner

INTEL CORPORATION

Lab

AI components

1

planning

Assignment

Recorded

Dataset

AIPD

2023_r1 edition

Application

15639077

An embodiment includes a method comprising: coupling a sacrificial material to a substrate; forming a first dielectric material adjacent the sacrificial material such that a horizontal axis intersects the first dielectric material and the sacrificial material; forming a first layer, on the first dielectric material and the sacrificial material, which includes a first metal interconnect and a third dielectric material; decoupling the substrate from the first dielectric material and the sacrificial material; removing the sacrificial material to form an empty cavity with sidewalls comprising the first dielectric material; after removing the sacrificial material to form the empty cavity, inserting a first die into the empty cavity; and forming a second dielectric material between the first dielectric material and the first die such that the horizontal axis intersects the first and second dielectric materials and the first die. Other embodiments are described herein.

PlanningH01L 23/13H10W 70/68H01L 25/10H10W 20/42H10W 70/614H10W 72/20H10W 74/114H10W 90/00+10 more

AI classification

Planning0.79
Vision0.02
Natural language0.01
Speech0.00
Evolutionary computation0.00
AI hardware0.00
Machine learning0.00
Knowledge representation0.00

Ownership

INTEL CORPORATION

assignment · 430710775

Assignors

AKKINEPALLY, PRANEETH

On an employer assignment, the assignors are typically the inventors.

From the same owner

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