ADVANCED OPTICAL SENSOR AND METHOD FOR DETECTING AN OPTICAL EVENT IN A LIGHT EMISSION SIGNAL IN A PLASMA CHAMBER
Patent №
US 10,692,705
Granted
2020-06-23
Filed 2016
Owner
TOKYO ELECTRON LIMITED
Lab
—
AI components
1
hardware
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
15351916
An advanced optical sensor and method for detection of optical events in a plasma processing system. The method includes detecting at least one light emission signal in a plasma processing chamber. The at least one detected light emission signal including light emissions from an optical event. The method further includes processing the at least one light emission signal and detecting a signature of the optical event from the processed light emission signal.
AI classification
Ownership
TOKYO ELECTRON LIMITED
assignment · 403980938
Assignors
MIHAYLOV, MIHAIL, TIAN, XINKANG, MENG, CHING-LING, FERNS, JASON, NG, JOEL, HYATT, BADRU D., YAN, ZHENG, VUONG, VI
On an employer assignment, the assignors are typically the inventors.