GENERATING ROBUST MACHINE LEARNING PREDICTIONS FOR SEMICONDUCTOR MANUFACTURING PROCESSES
Patent №
US 11,029,673
Granted
2021-06-08
Filed 2018
Owner
PDF SOLUTIONS, INC.
+1 more
Lab
—
AI components
5
ml · kr · planning · evo · hardware
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
16006614
Robust machine learning predictions. Temporal dependencies of process targets for different machine learning models can be captured and evaluated for the impact on process performance for target. The most robust of these different models is selected for deployment based on minimizing variance for the desired performance characteristic.
Machine learningKnowledge representationPlanningEvolutionary computationAI hardwareG05B 19/41885G05B 13/0265H10P 72/0612G05B 2219/32338G05B 2219/33034G05B 2219/37436G05B 2219/42155G05B 2219/45031+1 more
AI classification
Machine learning1.00
Planning1.00
AI hardware1.00
Knowledge representation0.92
Evolutionary computation0.56
Natural language0.03
Vision0.00
Speech0.00
Ownership
PDF SOLUTIONS, INC.
assignment · 490510361
STREAMMOSAIC, INC.
assignment · 553780989
Assignors
HONDA, TOMONORI, KEKATPURE, ROHAN D, DAVID, JEFFREY DRUE
On an employer assignment, the assignors are typically the inventors.
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