VALVE CONTROL APPARATUS AND VACUUM VALVE

A valve control apparatus comprises: a generator configured to generate a first set pressure signal; and a valve opening controller configured to perform the first valve opening control on the basis of the target pressure and, after the first valve opening control, perform the second valve opening control performing feedback control on the basis of a difference between the first set pressure signal and the chamber pressure. The generator generates the first set pressure signal on the basis of a first set pressure locus converging from the chamber pressure at the time of switching from the first valve opening control to the second valve opening control to the target pressure with a predetermined time constant.