MANUFACTURING PROCESS MONITORING APPARATUS

A manufacturing process monitoring apparatus capable of determining a manufacturing process is anomaly, without requiring any threshold value for determining the as anomaly is provided. The manufacturing process monitoring apparatus includes a data conversion unit configured to convert process data of a manufacturing facility, a feature value analysis unit configured to analyze the converted data based on information on feature values, a data restoration unit configured to restore data for each of a plurality of categories based on the information on the feature values and information on the analyzed result, a similarity calculation unit configured to calculate a similarity for each of the plurality of categories based on the data used when being analyzed and the restored data, a category determination unit configured to determine a category of the data based on the similarity for each of the plurality of categories, a category classification unit configured to classify the category to which the process data belongs, and a process state diagnostic unit configured to diagnose a state of the manufacturing process based on a result of comparison between the determined category and the classified category.