Patent №
US 11,615,993
Granted
2023-03-28
Filed 2020
Owner
KLA CORPORATION
Lab
—
AI components
4
ml · vision · evo · hardware
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
17093621
A care area is determined in an image of a semiconductor wafer. The care area is divided into sub-care areas based on the shapes of polygons in a design file associated with the care area. A noise scan of a histogram for the sub-care areas is then performed. The sub-care areas are clustered into groups based on the noise scan of the histogram.
Machine learningVisionEvolutionary computationAI hardwareH01L 22/20H10P 74/23G06F 7/22G06F 17/18G06F 18/231G06F 18/2321G06F 18/2433G06T 7/0004+9 more
AI classification
Vision1.00
Machine learning0.88
Evolutionary computation0.71
AI hardware0.51
Planning0.14
Knowledge representation0.00
Natural language0.00
Speech0.00
Ownership
KLA CORPORATION
assignment · 581090331
Assignors
HUANG, BOSHI, BRAUER, BJORN, PARK, SANGBONG
On an employer assignment, the assignors are typically the inventors.
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