INFORMATION PROCESSING DEVICE, PROGRAM, PROCESS TREATMENT EXECUTING DEVICE, AND INFORMATION PROCESSING SYSTEM
Patent №
US 11,619,926
Granted
2023-04-04
Filed 2021
Owner
TOKYO ELECTRON LIMITED
Lab
—
AI components
2
kr · planning
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
17646023
An information processing device includes: a recording means storing model data that reproduces a change of a workpiece, the model data being constructed, as an effect of process treatment, from differential data between initial state data and end state data of the workpiece, the end state data representing state of the workpiece to which the process treatment is applied under a predetermined process condition; an input receiving means for receiving an input of the initial state data and target end state data of the workpiece; a predicting means for predicting the end state data from the received initial state data, by using the model data and a combination of multiple model data in the recording means; and a determining means for determining a process condition of process treatment to be applied to the workpiece, based on a proximity between the predicted end state data and the target end state data.
AI classification
Ownership
TOKYO ELECTRON LIMITED
assignment · 584800001
Assignors
MOKI, HIRONORI, KATO, TAKAHIKO
On an employer assignment, the assignors are typically the inventors.