INFORMATION PROCESSING DEVICE, PROGRAM, PROCESS TREATMENT EXECUTING DEVICE, AND INFORMATION PROCESSING SYSTEM

Patent №

US 11,619,926

Granted

2023-04-04

Filed 2021

Owner

TOKYO ELECTRON LIMITED

Lab

AI components

2

kr · planning

Assignment

Recorded

Dataset

AIPD

2023_r1 edition

Application

17646023

An information processing device includes: a recording means storing model data that reproduces a change of a workpiece, the model data being constructed, as an effect of process treatment, from differential data between initial state data and end state data of the workpiece, the end state data representing state of the workpiece to which the process treatment is applied under a predetermined process condition; an input receiving means for receiving an input of the initial state data and target end state data of the workpiece; a predicting means for predicting the end state data from the received initial state data, by using the model data and a combination of multiple model data in the recording means; and a determining means for determining a process condition of process treatment to be applied to the workpiece, based on a proximity between the predicted end state data and the target end state data.

Knowledge representationPlanningG05B 19/4155G06Q 10/04G05B 19/41875G06Q 50/04G05B 2219/45031Y02P 90/30

AI classification

Planning0.99
Knowledge representation0.55
Machine learning0.49
Evolutionary computation0.48
AI hardware0.40
Vision0.01
Natural language0.01
Speech0.00

Ownership

TOKYO ELECTRON LIMITED

assignment · 584800001

Assignors

MOKI, HIRONORI, KATO, TAKAHIKO

On an employer assignment, the assignors are typically the inventors.

From the same owner

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