SYSTEMS AND METHODS FOR SEMICONDUCTOR DEFECT-GUIDED BURN-IN AND SYSTEM LEVEL TESTS

Patent №

US 11,624,775

Granted

2023-04-11

Filed 2021

Owner

KLA CORPORATION

Lab

AI components

4

ml · kr · planning · evo

Assignment

Recorded

Dataset

AIPD

2023_r1 edition

Application

17372292

Systems and methods for semiconductor defect-guided burn-in and system level tests (SLT) are configured to receive a plurality of inline defect part average testing (I-PAT) scores from an inline defect part average testing (I-PAT) subsystem, where the plurality of I-PAT scores is generated by the I-PAT subsystem based on semiconductor die data for a plurality of semiconductor dies, where the semiconductor die data includes characterization measurements for the plurality of semiconductor dies, where each I-PAT score of the plurality of I-PAT scores represents a defectivity determined by the I-PAT subsystem based on a characterization measurement of a corresponding semiconductor die of the plurality of semiconductor dies; apply one or more rules to the plurality of I-PAT scores during a dynamic decision-making process; and generate one or more defect-guided dispositions for at least one semiconductor die of the plurality of semiconductor dies based on the dynamic decision-making process.

Machine learningKnowledge representationPlanningEvolutionary computationG01R 31/287H01L 22/20H10P 74/23G01R 31/2894H01L 22/12H01L 22/14

AI classification

Planning0.99
Evolutionary computation0.93
Machine learning0.87
Knowledge representation0.72
AI hardware0.24
Vision0.01
Natural language0.01
Speech0.00

Ownership

KLA CORPORATION

assignment · 582070460

Assignors

RATHERT, ROBERT J., PRICE, DAVID W., LENOX, CHET V., DONZELLA, ORESTE, ROBINSON, JOHN CHARLES

On an employer assignment, the assignors are typically the inventors.

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