Patent №
US 11,624,775
Granted
2023-04-11
Filed 2021
Owner
KLA CORPORATION
Lab
—
AI components
4
ml · kr · planning · evo
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
17372292
Systems and methods for semiconductor defect-guided burn-in and system level tests (SLT) are configured to receive a plurality of inline defect part average testing (I-PAT) scores from an inline defect part average testing (I-PAT) subsystem, where the plurality of I-PAT scores is generated by the I-PAT subsystem based on semiconductor die data for a plurality of semiconductor dies, where the semiconductor die data includes characterization measurements for the plurality of semiconductor dies, where each I-PAT score of the plurality of I-PAT scores represents a defectivity determined by the I-PAT subsystem based on a characterization measurement of a corresponding semiconductor die of the plurality of semiconductor dies; apply one or more rules to the plurality of I-PAT scores during a dynamic decision-making process; and generate one or more defect-guided dispositions for at least one semiconductor die of the plurality of semiconductor dies based on the dynamic decision-making process.
AI classification
Ownership
KLA CORPORATION
assignment · 582070460
Assignors
RATHERT, ROBERT J., PRICE, DAVID W., LENOX, CHET V., DONZELLA, ORESTE, ROBINSON, JOHN CHARLES
On an employer assignment, the assignors are typically the inventors.