LEARNING DEVICE, INFERENCE DEVICE, AND LEARNED MODEL

Patent №

US 11,625,518

Granted

2023-04-11

Filed 2021

Owner

TOKYO ELECTRON LIMITED

Lab

AI components

1

ml

Assignment

Recorded

Dataset

AIPD

2023_r1 edition

Application

17274739

A learning device for performing a machine learning based on a learning model using data input to an input layer, includes: a calculation part configured to calculate a predetermined number of features, in which simulation data as a result of simulating semiconductor manufacturing processes by setting environmental information inside a process vessel in which the semiconductor manufacturing processes are performed and using a predetermined component provided in the process vessel as a variable, and XY coordinates parallel to a plane of a wafer are associated with each other; and an input part configured to input the calculated predetermined number of features to the input layer.

Machine learningG06F 30/27G06N 3/08G06F 30/398G06N 3/02G06N 3/0464G06N 3/09G06N 3/096H10P 14/60+2 more

AI classification

Machine learning1.00
Planning0.13
Vision0.11
AI hardware0.05
Knowledge representation0.00
Natural language0.00
Speech0.00
Evolutionary computation0.00

Ownership

TOKYO ELECTRON LIMITED

assignment · 555450065

Assignors

YAMAMOTO, KOSUKE, FUKUDOME, MOTOSHI, ITABASHI, KEN, FUSHIMI, NAOSHIGE, MATSUZAKI, KAZUYOSHI

On an employer assignment, the assignors are typically the inventors.

From the same owner

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