Patent №
US 11,625,518
Granted
2023-04-11
Filed 2021
Owner
TOKYO ELECTRON LIMITED
Lab
—
AI components
1
ml
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
17274739
A learning device for performing a machine learning based on a learning model using data input to an input layer, includes: a calculation part configured to calculate a predetermined number of features, in which simulation data as a result of simulating semiconductor manufacturing processes by setting environmental information inside a process vessel in which the semiconductor manufacturing processes are performed and using a predetermined component provided in the process vessel as a variable, and XY coordinates parallel to a plane of a wafer are associated with each other; and an input part configured to input the calculated predetermined number of features to the input layer.
AI classification
Ownership
TOKYO ELECTRON LIMITED
assignment · 555450065
Assignors
YAMAMOTO, KOSUKE, FUKUDOME, MOTOSHI, ITABASHI, KEN, FUSHIMI, NAOSHIGE, MATSUZAKI, KAZUYOSHI
On an employer assignment, the assignors are typically the inventors.