DROPLET EJECTING APPARATUS AND DROPLET EJECTING METHOD IN WHICH RELATIVE POSITIONS OF WORKPIECE TABLE AND DROPLET EJECTING HEAD ARE CORRECTED
Patent №
US 11,633,969
Granted
2023-04-25
Filed 2018
Owner
TOKYO ELECTRON LIMITED
Lab
—
AI components
1
vision
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
15911539
A control unit obtains a captured image of a reference workpiece by a second image capturing unit after a droplet ejected from a droplet ejecting head lands toward a reference mark formed on an upper surface of the reference workpiece, detects a positional deviation amount of a position of the reference mark and a landing position of the droplet based on the captured image, and calculates the correction amounts of the relative positions of a workpiece table and a droplet ejecting head based on the positional deviation amount.
AI classification
Ownership
TOKYO ELECTRON LIMITED
assignment · 454920431
Assignors
MIYAZAKI, KAZUHITO, KAKINO, AKIRA, YOSHITOMI, WATARU
On an employer assignment, the assignors are typically the inventors.