DROPLET EJECTING APPARATUS AND DROPLET EJECTING METHOD IN WHICH RELATIVE POSITIONS OF WORKPIECE TABLE AND DROPLET EJECTING HEAD ARE CORRECTED

Patent №

US 11,633,969

Granted

2023-04-25

Filed 2018

Owner

TOKYO ELECTRON LIMITED

Lab

AI components

1

vision

Assignment

Recorded

Dataset

AIPD

2023_r1 edition

Application

15911539

A control unit obtains a captured image of a reference workpiece by a second image capturing unit after a droplet ejected from a droplet ejecting head lands toward a reference mark formed on an upper surface of the reference workpiece, detects a positional deviation amount of a position of the reference mark and a landing position of the droplet based on the captured image, and calculates the correction amounts of the relative positions of a workpiece table and a droplet ejecting head based on the positional deviation amount.

VisionB41J 29/393B05B 12/084B05C 11/1005B05C 11/1015B05C 11/1034B41J 2/04505B41J 2/2135B41J 3/407+10 more

AI classification

Vision0.79
Natural language0.01
AI hardware0.00
Speech0.00
Evolutionary computation0.00
Machine learning0.00
Knowledge representation0.00
Planning0.00

Ownership

TOKYO ELECTRON LIMITED

assignment · 454920431

Assignors

MIYAZAKI, KAZUHITO, KAKINO, AKIRA, YOSHITOMI, WATARU

On an employer assignment, the assignors are typically the inventors.

From the same owner

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