Patent №
US 11,635,330
Granted
2023-04-25
Filed 2021
Owner
MASSACHUSETTS INSTITUTE OF TECHNOLOGY
Lab
AI components
1
hardware
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
17335017
Optical microcavity resonance measurements can have readout noise matching the fundamental limit set by thermal fluctuations in the cavity. Small-heat-capacity, wavelength-scale microcavities can be used as bolometers that bypass the limitations of other bolometer technologies. The microcavities can be implemented as photonic crystal cavities or micro-disks that are thermally coupled to strong mid-IR or LWIR absorbers, such as pyrolytic carbon columns. Each microcavity and the associated absorber(s) rest on hollow pillars that extend from a substrate and thermally isolate the cavity and the absorber(s) from the rest of the bolometer. This ensures that thermal transfer to the absorbers is predominantly from radiation as opposed to from conduction. As the absorbers absorb thermal radiation, they shift the resonance wavelength of the cavity. The cavity transduces this thermal change into an optical signal by reflecting or scattering more (or less) near-infrared (NIR) probe light as a function of the resonance wavelength shift.
AI classification
Ownership
MASSACHUSETTS INSTITUTE OF TECHNOLOGY
assignment · 579110386
Assignors
GOLDSTEIN, JORDAN, PANUSKI, CHRISTOPHER LOUIS, ENGLUND, DIRK ROBERT
On an employer assignment, the assignors are typically the inventors.