INFORMATION PROCESSING METHOD, INFORMATION PROCESSING APPARATUS AND COMPUTER-READABLE RECORDING MEDIUM
Patent №
US 11,636,579
Granted
2023-04-25
Filed 2021
Owner
TOKYO ELECTRON LIMITED
Lab
—
AI components
2
vision · evo
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
17178778
An information processing method includes obtaining information on a deformation factor of a surface of a target substrate; obtaining a surface image of the target substrate; calculating a correction coefficient for correcting an image change due to deformation of the surface, based on the information on the deformation factor of the surface; and generating a corrected image of the target substrate by correcting the surface image of the target substrate using the correction coefficient.
AI classification
Ownership
TOKYO ELECTRON LIMITED
assignment · 553510894
Assignors
TSURUDA, TOYOHISA, HOSAKA, MASATO
On an employer assignment, the assignors are typically the inventors.