METHOD AND APPARATUS FOR SCHOTTKY TFE INSPECTION

Patent №

US 11,640,896

Granted

2023-05-02

Filed 2021

Owner

NUFLARE TECHNOLOGY, INC.

+1 more

Lab

AI components

1

vision

Assignment

Recorded

Dataset

AIPD

2023_r1 edition

Application

17319208

The present disclosure is related to a Schottky thermal field (TFE) source for emitting an electron beam. Electron optics can adjust a shape of the electron beam before the electron beam impacts a scintillator screen. Thereafter, the scintillator screen generates an emission image in the form of light. An emission image can be adjusted and captured by a camera sensor in a camera at a desired magnification to create a final image of the Schottky TFE source's tip. The final image can be displayed and analyzed to for defects.

VisionH01J 37/222G01N 23/2251H01J 37/06H01J 37/073H01J 37/12H01J 37/224H01J 37/263G01N 2223/20+9 more

AI classification

Vision0.58
Machine learning0.00
AI hardware0.00
Speech0.00
Natural language0.00
Knowledge representation0.00
Evolutionary computation0.00
Planning0.00

Ownership

NUFLARE TECHNOLOGY, INC.

assignment · 562270686

NUFLARE TECHNOLOGY AMERICA, INC.

assignment · 562270686

Assignors

KATSAP, VICTOR

On an employer assignment, the assignors are typically the inventors.

From the same owner

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