SUBSTRATE PROCESSING DEVICE AND COMPONENT INSPECTION METHOD FOR SUBSTRATE PROCESSING DEVICE
Patent №
US 11,670,529
Granted
2023-06-06
Filed 2020
Owner
SCREEN HOLDINGS CO., LTD.
Lab
—
AI components
2
vision · planning
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
16634190
A substrate processing device according to the present invention is a substrate processing device that performs substrate processing with a processing solution and includes inspection means for inspecting degradation of components constituting the substrate processing device. The inspection means includes: capturing means for acquiring image data of the components; color information acquisition means for acquiring color information of an inspection target component from the image data acquired by the capturing means; and degradation determination means for determining a degradation degree of the inspection target component based on the acquired color information.
AI classification
Ownership
SCREEN HOLDINGS CO., LTD.
assignment · 516240626
Assignors
HASHIZUME, AKIO
On an employer assignment, the assignors are typically the inventors.