Patent US 4,095,891

Patent №

US 4,095,891

Granted

Owner

Lab

AI components

1

vision

Assignment

None on record

Dataset

AIPD

2023_r1 edition

Application

05754332

A system for exposing photoresists "on-the-fly" is disclosed. The system incorporates a dye laser having an output pulse duration of less than about 250 nanoseconds to expose the photoresist while the photoresist is moving. Means are provided to synchronize the output of the laser to the motion of a photoresist coated surface and to insure spatial uniformity of energy across an object plane of an optical projection system.

AI classification

Vision0.71
Knowledge representation0.00
Machine learning0.00
Natural language0.00
Evolutionary computation0.00
Speech0.00
AI hardware0.00
Planning0.00
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