Patent №
US 4,095,891
Granted
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Owner
—
Lab
—
AI components
1
vision
Assignment
None on record
Dataset
AIPD
2023_r1 edition
Application
05754332
A system for exposing photoresists "on-the-fly" is disclosed. The system incorporates a dye laser having an output pulse duration of less than about 250 nanoseconds to expose the photoresist while the photoresist is moving. Means are provided to synchronize the output of the laser to the motion of a photoresist coated surface and to insure spatial uniformity of energy across an object plane of an optical projection system.
VisionG03F 7/704
AI classification
Vision0.71
Knowledge representation0.00
Machine learning0.00
Natural language0.00
Evolutionary computation0.00
Speech0.00
AI hardware0.00
Planning0.00