Patent №
US 4,353,087
Granted
1982-10-05
Filed 1979
Owner
—
Lab
—
AI components
1
vision
Assignment
None on record
Dataset
AIPD
2023_r1 edition
Application
06019964
A target for use in aligning masks used in producing microcircuits which is of a size that can be printed on a microcircuit chip without interfering with the lines thereon, consisting only of lines vertically or diagonally disposed with respect to the image transducer is disclosed. Also disclosed is an automatic system for aligning such targets.
AI classification
Vision1.00
Natural language0.00
AI hardware0.00
Planning0.00
Machine learning0.00
Speech0.00
Evolutionary computation0.00
Knowledge representation0.00