METHOD OF MAKING A PLURALITY OF MOSFETS HAVING DIFFERENT THRESHOLD VOLTAGES

An integrated circuit using MOSFETs having varying threshold voltages permitting improved performance and reduced area utilization on a monolithic semiconductor chip is produced by selectively varying ion implantation doses in the channels of the MOSFETs. By repeated masking and implanting steps, selected MOSFETs are implanted with differing doses of ions and combinations of doses, thereby forming circuit portions with MOSFETs having threshold voltages tailored to optimize different characteristics associated with different circuit portions.