Patent №
US 4,628,531
Granted
1986-12-09
Filed 1984
Owner
HITACHI, LTD., A CORP. OF JAPAN
Lab
—
AI components
1
vision
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
06583867
A pattern checking apparatus carries out the detection of candidate defects through a primary selection with a sensitivity high enough to detect any existing defect, and then carries out a detailed analysis by a controlling processor for a pattern including the periphery of the detected candidate defect through a secondary selection in which a candidate defect which is not a defect in a practical sense is removed from candidates, so that only real defects are detected.
AI classification
Ownership
HITACHI, LTD., A CORP. OF JAPAN
assignment · 42350740
Assignors
OKAMOTO, KEIICHI, NAKAHATA, KOZO, MATSUYAMA, YUKIO, DOI, HIDEAKI, AIUCHI, SUSUMU, NOMOTO, MINEO
On an employer assignment, the assignors are typically the inventors.