Patent №
US 4,643,579
Granted
1987-02-17
Filed 1984
Owner
CANON KABUSHIKI KAISHA
Lab
—
AI components
1
vision
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
06672784
A method of aligning a first object and a second object comprises the steps of detecting, in at least two directions of detection in each examination region of which is included the superposed portion of a first area type mark formed on the first object and a second area type mark formed on the second object when the two marks are seen from a predetermined direction, the lengths of the superposed portion and the non-superposed portion of the marks in the first and second objects or the images thereof, and comparing the detected lengths and operating a positional deviation.
AI classification
Ownership
CANON KABUSHIKI KAISHA
assignment · 43370369
Assignors
TORIUMI, YUKI, SUZUKI, KAZUNORI, KATSUTA, HIROO
On an employer assignment, the assignors are typically the inventors.