ELECTRO-OPTICAL PART INSPECTION IN THE PRESENCE OF CONTAMINATION AND SURFACE FINISH VARIATION

A method and apparatus for provided for sensing the location of a surface of an object in the presence of localized surface contamination, roughness or other minor irregularities. A light image of pattern is imaged onto a photodetector corresponding to each of a plurality of points or zones on the surface of an object illuminated with light so that the photodetector produces an electrical output signal related to the relative location of the individual points or zones. Values represented by the electrical signals are then averaged and the results used in determining the location of the surface. Values falling outside of a preselected threshold or thresholds can be discarded in evaluating the results, in lieu of, or prior to, averaging.