SEMICONDUCTOR DEFECTS CURING METHOD AND APPARATUS

Patent №

US 4,725,558

Granted

1988-02-16

Filed 1986

Owner

SEMICONDUCTOR ENERGY LABORATORY CO., LTD.

Lab

AI components

1

hardware

Assignment

Recorded

Dataset

AIPD

2023_r1 edition

Application

06927501

An improved semiconductor defects curing method and apparatus are disclosed which is free from current leakage due to pin-holes or other defects. Also an improved method for processing a semiconductor device is shown. According to the invention, the gaps or holes in the semiconductor layer produced in the fabrication process are filled with insulator in advance of deposition of electrodes.

AI hardwareH10F 71/10H10F 71/135H10F 19/31H10F 77/955Y02E 10/50Y02P 70/50Y10S 136/29

AI classification

AI hardware0.57
Natural language0.03
Machine learning0.01
Knowledge representation0.00
Evolutionary computation0.00
Vision0.00
Speech0.00
Planning0.00

Ownership

SEMICONDUCTOR ENERGY LABORATORY CO., LTD.

assignment · 46270583

Assignors

YAMAZAKI, SHUNPEI, SUZUKI, KUNIO, KINKA, MIKIO, FUKADA, TAKESHI, ABE, MASAYOSHI, KOBAYASHI, IPPEI, SHIBATA, KATSUHIKO, SUSUKIDA, MASATO, NAGAYAMA, SUSUMU, KOYANAGI, KAORU

On an employer assignment, the assignors are typically the inventors.

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