METHOD AND APPARATUS FOR INSPECTING RETICLES

Patent №

US 4,875,780

Granted

1989-10-24

Filed 1988

Owner

EASTMAN KODAK COMPANY

Lab

AI components

1

vision

Assignment

Recorded

Dataset

AIPD

2023_r1 edition

Application

07160194

A laser light inspection device for inspecting opposite surfaces of a workpiece with a low angle laser light beam. The laser light beam is directed in successive scans of a first and second sides in a repetitive manner using a pair of dividing mirrors and a pair of low angle mirrors. Light reflected by any debris back toward the direction of origin of the light beam is collected and analyzed.

VisionG01N 21/94G01N 21/95607G01N 2021/95676

AI classification

Vision0.50
AI hardware0.00
Evolutionary computation0.00
Natural language0.00
Machine learning0.00
Knowledge representation0.00
Speech0.00
Planning0.00

Ownership

EASTMAN KODAK COMPANY

assignment · 48450768

Assignors

MORAN, KEVIN E., SMITH, MICHAEL L., LIPPARD, ERNEST R. III

On an employer assignment, the assignors are typically the inventors.

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