Patent №
US 4,967,337
Granted
1990-10-30
Filed 1988
Owner
TEXAS INSTRUMENTS INCORPORATED, A CORP. OF DE
Lab
—
AI components
3
kr · planning · hardware
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
07256020
Artificial intelligence diagnostic expert system software is used to interrogate and monitor etcher machine state by directly accessing vital hardware/process sensors. Sensor values and `recipe` variables are analyzed to determine cause of failures and recommend repair strategies, realtime monitoring and analysis of these values allows the expert system to predict failures prior to occurrence and show cause of impending failure.
AI classification
Ownership
TEXAS INSTRUMENTS INCORPORATED, A CORP. OF DE
assignment · 49590609
Assignors
ENGLISH, ROE E., KILGORE, MICHAEL A., CRONE, JERRY A.
On an employer assignment, the assignors are typically the inventors.