Patent №
US 5,084,825
Granted
1992-01-28
Filed 1988
Owner
SPECTRUM CVD, INC., A CORP. OF DE.
+4 more
Lab
—
AI components
1
planning
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
07164746
A process control system is disclosed in which process variables are treated as mapped in n-dimensional space, where n is the number of orthogonal directions. Three functions, set, check, and term, provide the link between expected and actual conditions. The check and term functions operate on orthogonal coordinates. Each parameter has a guard band to provide a soft boundary for the parameter.
AI classification
Ownership
SPECTRUM CVD, INC., A CORP. OF DE.
assignment · 48560928
MOTOROLA CVD, INC., A CORP. OF DELAWARE
namechg · 55730634
BCT SPECTRUM INC., A CORP. OF DELAWARE
assignment · 55730645
BALZERS AKTIENGESELLSCHAFT
assignment · 58630503
TOKYO ELECTRON LIMITED
assignment · 93060971
Assignors
KELLY, JOHN H., LANUS, MARK S.
On an employer assignment, the assignors are typically the inventors.