Patent №
US 5,285,075
Granted
1994-02-08
Filed 1992
Owner
HITACHI, LTD.
Lab
—
AI components
1
vision
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
07964049
A sample stage is moved so that an alignment mark on a wafer successively move on positions symmetric to the positional origin of the electron beam, and waveformes of signals obtained by scanning the alignment mark at the symmetric positions with electron beam are added each other so as to be symmetry and decrease the alignment-mark position detecting error.
VisionH01J 37/3045
AI classification
Vision0.57
Evolutionary computation0.05
Planning0.04
Natural language0.01
Speech0.00
Machine learning0.00
Knowledge representation0.00
AI hardware0.00
Ownership
HITACHI, LTD.
assignment · 66520389
Assignors
MINAMIDE, Y., MATSUOKA, G., ANDO, H.
On an employer assignment, the assignors are typically the inventors.
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