METHOD OF CONSTRUCTING CMOS VERTICALLY MODULATED WELLS (VMW) BY CLUSTERED MEV BILLI (BURIED IMPLANTED LAYER FOR LATERAL ISOLATION) IMPLANTATION
Patent №
US 5,501,993
Granted
1996-03-26
Filed 1994
Owner
GENUS, INC.
+2 more
Lab
—
AI components
1
hardware
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
08343116
CMOS vertically modulated wells are constructed by using clustered MeV ion implantation to form a structure having a buried implanted layer for laterial isolation.
AI hardwareH01L 21/76218H10W 10/13H01L 21/761H10D 84/0191H10D 84/038H10D 84/856H10W 10/0127H10W 10/031+1 more
AI classification
AI hardware0.95
Vision0.01
Natural language0.00
Machine learning0.00
Speech0.00
Evolutionary computation0.00
Planning0.00
Knowledge representation0.00
Ownership
GENUS, INC.
assignment · 72290067
VARIAN ASSOCIATES, INC.
assignment · 93500402
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
assignment · 100240960
Assignors
BORLAND, JOHN O.
On an employer assignment, the assignors are typically the inventors.
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