Patent №
US 5,756,375
Granted
1998-05-26
Filed 1996
Owner
TEXAS INSTRUMENTS INCORPORATED
Lab
—
AI components
1
hardware
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
08664940
Molecular beam epitaxy (202) with growing layer thickness and doping control (206) by feedback of sensor signals such as spectrosceopic ellipsometer signals based on a process model. Examples include III-V compound structures with multiple AlAs, InGaAs, and InAs layers as used in resonant tunneling diodes and hetrojunction bipolar transistors with doped and undoped GaAs layers, AlGaAs and InGaAs.
AI hardwareB24B 37/013H01L 22/26H10P 74/238H01L 21/02392H01L 21/02463H01L 21/02546H10P 14/2909H10P 14/3221+1 more
AI classification
AI hardware0.97
Machine learning0.02
Speech0.00
Planning0.00
Natural language0.00
Evolutionary computation0.00
Knowledge representation0.00
Vision0.00
Ownership
TEXAS INSTRUMENTS INCORPORATED
assignment · 83930233
Assignors
CELII, FRANCIS G., KIM, TAE S., DUNCAN, WALTER M.
On an employer assignment, the assignors are typically the inventors.
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