METHOD AND DEVICE FOR MEASURING PHYSICAL QUANTITY, METHOD FOR FABRICATING SEMICONDUCTOR DEVICE, AND METHOD AND DEVICE FOR MEASURING WAVELENGTH

Patent №

US 5,773,316

Granted

1998-06-30

Filed 1995

Owner

FUJITSU LIMITED

Lab

AI components

1

hardware

Assignment

Recorded

Dataset

AIPD

2023_r1 edition

Application

08401689

Pulsed laser beams are applied to an object to be measured. A first laser beam of a pulsed laser beam having a first wavelength which is oscillated immediately after the rise of the pulsed laser beam, and a second laser beam having a second wavelength which is oscillated thereafter are used. Based on a difference between an intensity of first interfered light of reflected light of the first laser beam or transmitted light thereof, and an intensity of reflected light of the second laser beam or transmitted light thereof, temperatures of the object to be measured, and whether the temperatures are on increase or on decrease are judged. The method and device can be realized by simple structures and can measure a direction of changes of the physical quantities.

AI hardwareG01K 11/00B24B 37/013H01L 22/26H10P 74/238H01L 22/12H10P 74/203

AI classification

AI hardware0.62
Planning0.02
Evolutionary computation0.01
Vision0.01
Natural language0.00
Speech0.00
Machine learning0.00
Knowledge representation0.00

Ownership

FUJITSU LIMITED

assignment · 73940988

Assignors

KUROSAKI, RYO, KIKUCHI, JUN, SERIZAWA, HARUHIKO, FUJIMURA, SHUZO

On an employer assignment, the assignors are typically the inventors.

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