METHOD AND DEVICE FOR MEASURING PHYSICAL QUANTITY, METHOD FOR FABRICATING SEMICONDUCTOR DEVICE, AND METHOD AND DEVICE FOR MEASURING WAVELENGTH
Patent №
US 5,773,316
Granted
1998-06-30
Filed 1995
Owner
FUJITSU LIMITED
Lab
—
AI components
1
hardware
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
08401689
Pulsed laser beams are applied to an object to be measured. A first laser beam of a pulsed laser beam having a first wavelength which is oscillated immediately after the rise of the pulsed laser beam, and a second laser beam having a second wavelength which is oscillated thereafter are used. Based on a difference between an intensity of first interfered light of reflected light of the first laser beam or transmitted light thereof, and an intensity of reflected light of the second laser beam or transmitted light thereof, temperatures of the object to be measured, and whether the temperatures are on increase or on decrease are judged. The method and device can be realized by simple structures and can measure a direction of changes of the physical quantities.
AI classification
Ownership
FUJITSU LIMITED
assignment · 73940988
Assignors
KUROSAKI, RYO, KIKUCHI, JUN, SERIZAWA, HARUHIKO, FUJIMURA, SHUZO
On an employer assignment, the assignors are typically the inventors.