Patent №
US 6,088,083
Granted
2000-07-11
Filed 1998
Owner
CARL-ZEISS-STIFTUNG HEIDENHEIM/BRENZ
+1 more
Lab
—
AI components
1
vision
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
09175429
The invention is directed to an optical image recording arrangement of a three-dimensional object wherein an illuminating raster generator simultaneously generates a plurality of separate light spots in a first focal plane. The light spots in the first focal plane are imaged by optical elements into a second focal plane on the three-dimensional object. The image of the light spots is imaged by optical elements onto a first detector device having several detector elements. A displacing device is mounted in the beam path of the illuminating raster generator. The displacing device effects at least a two-axis position change of the first focal plane. The method of the invention determines the sharply imaged regions of a three-dimensional object in an optical image recording arrangement. An illuminating raster generator in the image recording arrangement simultaneously generates a plurality of separate light spots in a first focal plane. The light spots in the first focal plane are imaged by optical elements into a second focal plane on the three-dimensional object. The image of the light spots is imaged by optical elements onto a first detector device having several detector elements and the image of the object is recorded by a second detector device. A correlation of the images of both detector devices is made.
AI classification
Ownership
CARL-ZEISS-STIFTUNG HEIDENHEIM/BRENZ
assignment · 95230049
CARL ZEISS SMT AG
assignment · 166300725
Assignors
MEIER, HANS-JUERGEN
On an employer assignment, the assignors are typically the inventors.