Patent №
US 6,088,092
Granted
2000-07-11
Filed 1999
Owner
PHASE METRICS, INC.
Lab
—
AI components
1
vision
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
09337142
An optical inspection station for inspecting a substrate. The substrate may include a first surface and a second surface. Light is reflected from both the first and second surfaces of the substrate. The light reflected from the first surface is detected by a light detector. A controller may determine a surface characteristic of the first surface from the detected light. The system may include a spatial filter that filters the light reflected from the second surface. The spatial filter eliminates the optical noise that may be created by the light reflected from the second surface.
AI classification
Ownership
PHASE METRICS, INC.
assignment · 100630657
Assignors
CHEN, LI, CHHIBBER, RAJ
On an employer assignment, the assignors are typically the inventors.