PROCESS CONTROL DEVICE AND PROCESS CONTROL METHOD ENABLING RESTORATION OF LOT CONTROL

A process control device for controlling a processing device and a transport apparatus while updating process information of a lot includes: a control information update unit to update control information for controlling the processing device and the transport apparatus; a work-in-process information update unit to update the work-in-process information indicating a location of a lot; a processing device control unit to control the processing device according to the control information updated by the control information update unit and the work-in-process information updated by the work-in-process information updated unit; and a transport apparatus control unit to control the transport apparatus according to the control information updated by the control information update unit and the work-in-process information updated by the work-in-process information update unit. The control information update unit deletes, when trouble occurs, the control information of a lot that is in process at a location where the trouble occurred. Thus, it is possible to release the lot from control of the process control device, and to prevent control of other lots from being restricted.