LITHOGRAPHY SYSTEM USING QUANTUM ENTANGLED PHOTONS

Patent №

US 6,480,283

Granted

2002-11-12

Filed 1999

Owner

CALIFORNIA, INSTITUTE OF TECHNOLOGY

Lab

AI components

1

hardware

Assignment

Recorded

Dataset

AIPD

2023_r1 edition

Application

09393200

A system of etching using quantum entangled particles to get shorter interference fringes. An interferometer is used to obtain an interference fringe. N entangled photons are input to the interferometer. This reduces the distance between interference fringes by n, where again n is the number of entangled photons.

AI hardwareG03F 7/70408G03F 7/001

AI classification

AI hardware0.97
Natural language0.00
Knowledge representation0.00
Speech0.00
Machine learning0.00
Vision0.00
Evolutionary computation0.00
Planning0.00

Ownership

CALIFORNIA, INSTITUTE OF TECHNOLOGY

assignment · 104430903

Assignors

DOWLING, JONATHAN P., WILLIAMS, COLIN P., ROSA, GIOVANNI DELLA

On an employer assignment, the assignors are typically the inventors.

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