METHOD AND APPARATUS FOR USING LATENCY TIME AS A RUN-TO RUN CONTROL PARAMETER

Patent №

US 6,571,371

Granted

2003-05-27

Filed 2000

Owner

ADVANCED MICRO DEVICES, INC.

Lab

AI components

2

ml · planning

Assignment

Recorded

Dataset

AIPD

2023_r1 edition

Application

09749293

The present invention provides for a method and an apparatus for using a latency time period as a control input parameter. A manufacturing run of semiconductor devices is processed. Metrology data from the processed semiconductor devices is acquired. A latency analysis process is performed using the acquired metrology data. A feedback/feed-forward modification process is performed in response to the latency analysis process.

Machine learningPlanningG03F 7/70533H01L 22/20H10P 74/23Y10S 438/946

AI classification

Planning0.98
Machine learning0.83
AI hardware0.13
Evolutionary computation0.02
Natural language0.00
Knowledge representation0.00
Speech0.00
Vision0.00

Ownership

ADVANCED MICRO DEVICES, INC.

assignment · 114240428

Assignors

COSS, JR., ELFIDO, CONBOY, MICHAEL R., HENDRIX, BRYCE

On an employer assignment, the assignors are typically the inventors.

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