QUALITY CONTROL METHOD FOR PRODUCT PRODUCTION APPARATUS

Patent №

US 6,606,574

Granted

2003-08-12

Filed 2001

Owner

MITSUBISHI DENKI KABUSHIKI KAISHA

Lab

AI components

1

planning

Assignment

Recorded

Dataset

AIPD

2023_r1 edition

Application

09876234

A method and system for quality control of a production line. Troubles with quality are prevented by detecting a trend in quality characteristics of the production line or fluctuations in an early stage. The absolute values of the differences between same kinds of the data obtained at given measurement points regarding quality control data or the absolute values of the differences between same items of one kind of SPC data are used as a controlled item for detecting a trend in quality control characteristics or fluctuations of the quality control characteristics. The differences between maximum and minimum values of the quality control data at measurement points within the same lot or within the same wafer are used as the differences between same kinds of the quality control data, for example.

PlanningH01L 22/20H10P 74/23

AI classification

Planning1.00
Knowledge representation0.21
Machine learning0.02
Evolutionary computation0.01
Vision0.01
Natural language0.00
Speech0.00
AI hardware0.00

Ownership

MITSUBISHI DENKI KABUSHIKI KAISHA

assignment · 121650920

Assignors

TAKANABE, NAOKO

On an employer assignment, the assignors are typically the inventors.

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