Patent №
US 6,642,129
Granted
2003-11-04
Filed 2001
Owner
BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS, THE
Lab
—
AI components
1
hardware
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
10008719
A microfabricated probe array for nanolithography and process for designing and fabricating the probe array. The probe array consists of individual probes that can be moved independently using thermal bimetallic actuation or electrostatic actuation methods. The probe array can be used to produce traces of diffusively transferred chemicals on the substrate with sub-1 micrometer resolution, and can function as an arrayed scanning probe microscope for subsequent reading and variation of transferred patterns.
AI classification
Ownership
BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS, THE
assignment · 127520040
Assignors
LIU, CHANG, ZHANG, MING, BULLEN, DAVID ANDREW
On an employer assignment, the assignors are typically the inventors.