DATA ANALYSIS APPARATUS, DATA ANALYSIS METHOD, AND COMPUTER PRODUCTS

Data to be analyzed, for example, a yield value and various measurement values are selected and extracted from an original data group (step S1). At least one data distribution characteristic is extracted with respect to the extracted data (step S2). The data distribution characteristic amount to be analyzed is selected from these characteristics, and data mining such as a regression tree analysis is performed, designating it as a target variable (step S3). After the regression tree analysis has been completed with respect to all the extracted data distribution characteristics (step S4), the analysis result is output, and the engineer confirms it (step S5), and makes a decision (step S6).