PUSH-TYPE SCHEDULING FOR SEMICONDUCTOR FABRICATION

Control for a production line that queues work-in-process (WIP) prior to a re-entrant bottleneck processing node, such as a photolithography device in a semi-conductor fabrication line. For each WIP, a determination is made as to whether a cleared trajectory is available through all processing nodes subsequent to the bottleneck processing node and back to the re-entrant node or to exit of the production line. If a cleared trajectory is available, the subsequent processing nodes are reserved for the WIP. The WIP is then injected into the process flow, with the result that secondary bottlenecks at downstream processing nodes are largely avoided because the nodes have been pre-reserved. If a cleared trajectory for more than one WIP is available, selection of one WIP for injection into the workflow can be made based on a queuing or priority based selection process.