Patent №
US 6,764,795
Granted
2004-07-20
Filed 2002
Owner
TEXAS INSTRUMENTS INCORPORATED
Lab
—
AI components
1
nlp
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
10225743
A method and system for mask pattern correction are disclosed. A portion of a mask pattern is segmented into segments (22) that include a base segment (22a) and a relational segment (22b). The relational segment (22b) is matched with the base segment (22a). A proximity correction is determined for the base segment (22a), and a critical dimension correction is determined for the relational segment (22b). The critical dimension correction is determined with respect to the proximity correction of the matching base segment (22a).
AI classification
Ownership
TEXAS INSTRUMENTS INCORPORATED
assignment · 132350424
Assignors
ATON, THOMAS J., SOPER, ROBERT A.
On an employer assignment, the assignors are typically the inventors.