Patent №
US 6,925,347
Granted
2005-08-02
Filed 2002
Owner
ADVANCED MICRO DEVICES, INC.
Lab
—
AI components
2
planning · hardware
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
10223174
A method and apparatus is provided for a process control based on an estimated process result. The method comprises processing a workpiece using a processing tool, receiving trace data associated with the processing of the workpiece from the processing tool and estimating at least one process result of the workpiece based on at least a portion of the received trace data. The method further comprises adjusting processing of a next workpiece based on the estimated at least one process result.
AI classification
Ownership
ADVANCED MICRO DEVICES, INC.
assignment · 132080157
Assignors
MILLER, MICHAEL L., SONDERMAN, THOMAS J., PASADYN, ALEXANDER J., MARKLE, RICHARD J., CUSSON, BRIAN J., COWAN, PATRICK M., JACKSON, TIMOTHY L., JENKINS, NAOMI M.
On an employer assignment, the assignors are typically the inventors.