NETWORK-BASED PHOTOMASK DATA ENTRY INTERFACE AND INSTRUCTION GENERATOR FOR MANUFACTURING PHOTOMASKS

Patent №

US 6,968,530

Granted

2005-11-22

Filed 2003

Owner

DUPONT PHOTOMASKS, INC.

+2 more

Lab

AI components

1

planning

Assignment

Recorded

Dataset

AIPD

2023_r1 edition

Application

10657648

A computer network for generating instructions for photomask manufacturing equipment, based on photomask specification data input by a customer. A series of order entry screens are downloaded to a remote customer's computer, typically via an internet connection. The customer is prompted to enter photomask specification data, which is delivered to computing equipment on the manufacturer's local network. The manufacturer's computing equipment validates the photomask specification data, and uses this data to generate fracturing instructions and equipment control instructions. The fracturing instructions, together with pattern design data from the customer, are delivered to a fracture engine, which provides fractured pattern data. The control instructions and the fractured pattern data may then be electronically delivered to the manufacturing equipment.

PlanningG03F 1/00G03F 1/68G06Q 30/02G06Q 30/04G06Q 30/0603G06Q 50/04H01J 2237/31762Y02P 90/30

AI classification

Planning1.00
Vision0.03
Evolutionary computation0.01
Knowledge representation0.00
Natural language0.00
Machine learning0.00
AI hardware0.00
Speech0.00

Ownership

DUPONT PHOTOMASKS, INC.

assignment · 178440822

THE ATHENS GROUP, INC.

assignment · 178440899

TOPPAN PHOTOMASKS, INC.

merger · 178440934

Assignors

SCHEPP, JEFF S., GENTRY, JAN E.

On an employer assignment, the assignors are typically the inventors.

© 2026 NYSGPT2525 LLC