NETWORK-BASED PHOTOMASK DATA ENTRY INTERFACE AND INSTRUCTION GENERATOR FOR MANUFACTURING PHOTOMASKS
Patent №
US 6,968,530
Granted
2005-11-22
Filed 2003
Owner
DUPONT PHOTOMASKS, INC.
+2 more
Lab
—
AI components
1
planning
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
10657648
A computer network for generating instructions for photomask manufacturing equipment, based on photomask specification data input by a customer. A series of order entry screens are downloaded to a remote customer's computer, typically via an internet connection. The customer is prompted to enter photomask specification data, which is delivered to computing equipment on the manufacturer's local network. The manufacturer's computing equipment validates the photomask specification data, and uses this data to generate fracturing instructions and equipment control instructions. The fracturing instructions, together with pattern design data from the customer, are delivered to a fracture engine, which provides fractured pattern data. The control instructions and the fractured pattern data may then be electronically delivered to the manufacturing equipment.
AI classification
Ownership
DUPONT PHOTOMASKS, INC.
assignment · 178440822
THE ATHENS GROUP, INC.
assignment · 178440899
TOPPAN PHOTOMASKS, INC.
merger · 178440934
Assignors
SCHEPP, JEFF S., GENTRY, JAN E.
On an employer assignment, the assignors are typically the inventors.