Patent №
US 6,985,220
Granted
2006-01-10
Filed 2003
Owner
KLA-TENCOR TECHNOLOGIES CORPORATION
Lab
—
AI components
2
vision · planning
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
10644319
A method of tuning an inspection system. An inspection piece is sensed and analyzed to identify anomalies. Level information is analyzed with an initial set of thresholds, and an initial portion of the anomalies are flagging as defects. The inspection system parameters are changed, and the level information is analyzed with a modified set of thresholds. The anomalies are flagged as defects based on the immediately preceding analysis of the level information. The steps of changing the thresholds and reflagging the defects are repeated as desired, and the modified set of thresholds are stored for use in an inspection system recipe.
AI classification
Ownership
KLA-TENCOR TECHNOLOGIES CORPORATION
assignment · 143220655