INTERACTIVE THRESHOLD TUNING

Patent №

US 6,985,220

Granted

2006-01-10

Filed 2003

Owner

KLA-TENCOR TECHNOLOGIES CORPORATION

Lab

AI components

2

vision · planning

Assignment

Recorded

Dataset

AIPD

2023_r1 edition

Application

10644319

A method of tuning an inspection system. An inspection piece is sensed and analyzed to identify anomalies. Level information is analyzed with an initial set of thresholds, and an initial portion of the anomalies are flagging as defects. The inspection system parameters are changed, and the level information is analyzed with a modified set of thresholds. The anomalies are flagged as defects based on the immediately preceding analysis of the level information. The steps of changing the thresholds and reflagging the defects are repeated as desired, and the modified set of thresholds are stored for use in an inspection system recipe.

VisionPlanningG05B 19/41875G01N 21/8851G05B 23/0235G01N 2021/8874G05B 2219/32184G05B 2219/32222G05B 2219/45031Y02P 90/02

AI classification

Vision1.00
Planning0.99
Knowledge representation0.36
Machine learning0.00
Natural language0.00
Speech0.00
AI hardware0.00
Evolutionary computation0.00

Ownership

KLA-TENCOR TECHNOLOGIES CORPORATION

assignment · 143220655

© 2026 NYSGPT2525 LLC