METHOD AND APPARATUS FOR MANAGING SURFACE IMAGE OF THIN FILM DEVICE, AND METHOD AND APPARATUS FOR MANUFACTURING THIN FILM DEVICE USING THE SAME
Patent №
US 6,987,874
Granted
2006-01-17
Filed 2002
Owner
HITACHI, LTD.
Lab
—
AI components
1
vision
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
10054274
A tool useful for defect analysis can be provided in which a surface image of the whole single die is detected, and the surface image of the whole detected die, information of defect position and a magnified image of a defect region are displayed together at a time so that the operator can intuitively grasp what circuit pattern the defect or the like is located on within a die.
AI classification
Vision0.88
Evolutionary computation0.18
Planning0.03
Machine learning0.01
Natural language0.00
AI hardware0.00
Knowledge representation0.00
Speech0.00
Ownership
HITACHI, LTD.
assignment · 125290528
Assignors
HIROSE, TAKENORI, NOMOTO, MINEO
On an employer assignment, the assignors are typically the inventors.
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