Patent №
US 7,050,879
Granted
2006-05-23
Filed 2003
Owner
MICRO DEVICES, INC.
Lab
—
AI components
1
planning
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
10406463
A method and an apparatus are provided for adjusting a sampling protocol in an adaptive control process. The method comprises determining a performance value based on a measurement associated with at least one or more previously processed workpieces, adjusting a sampling protocol for one or more processed workpieces based on the determined performance value, and measuring the one or more processed workpieces according to the sampling protocol to provide one or more measurements. The method further comprises adjusting at least one of a process model and a control parameter based on at least a portion of the one or more measurements.
AI classification
Ownership
MICRO DEVICES, INC.
assignment · 139460316
Assignors
WANG, JIN, CHERRY, GREGORY A.
On an employer assignment, the assignors are typically the inventors.