Patent №
US 7,054,786
Granted
2006-05-30
Filed 2003
Owner
TOKYO ELECTRON LIMITED
Lab
—
AI components
2
ml · planning
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
10332011
In an operation monitoring method according to the present invention, operation data of a plasma processing system (1) are detected for every wafer (W) by means of a plurality of detectors, and a principal component analysis using the operation data is carried out by means of a controller (10). An operation state of the plasma processing system (1) is evaluated by using the results of the principal component analysis.
AI classification
Planning1.00
Machine learning0.80
Vision0.02
Evolutionary computation0.02
Natural language0.01
AI hardware0.00
Knowledge representation0.00
Speech0.00
Ownership
TOKYO ELECTRON LIMITED
assignment · 142120750
Assignors
SAKANO, SHINJI, SENDODA, TSUYOSHI
On an employer assignment, the assignors are typically the inventors.
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