SYSTEM AND METHOD FOR SETTING AND COMPENSATING ERRORS IN AOI AND POI OF A BEAM OF EM RADIATION
Patent №
US 7,136,172
Granted
2006-11-14
Filed 2004
Owner
J.A. WOOLLAM CO. INC.
Lab
—
AI components
1
vision
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
10858795
System and methodology for setting, and compensating detected errors between intended and realized Angle-of-Incidence (AOI) and Plane-Of-Incidence (POI) settings in ellipsometer and the like systems during analysis of sample characterizing data.
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Machine learning0.00
Natural language0.00
Evolutionary computation0.00
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Ownership
J.A. WOOLLAM CO. INC.
assignment · 157140886
Assignors
JOHS, BLAINE D., PFEIFFER, GALEN L., GOEDEN, CHRISTOPHER A., LIPHARDT, MARTIN M.
On an employer assignment, the assignors are typically the inventors.
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