PATTERN MATCHING METHOD AND DEVICE, POSITION DETERMINING METHOD AND DEVICE, POSITION ALIGNING METHOD AND DEVICE, EXPOSING METHOD AND DEVICE, AND DEVICE AND ITS PRODUCTION METHOD

A template creating unit (32) creates a waveform template formed of expectations of a signal waveform of the value of each parameter and a probability template formed of information on occurrence probability of each expectation of the parameters on the basis of the signal waveform measured. A matching judging unit (33) performs template matching of another signal waveform measured while using the expectation occurrence probability information included in the probability template as weight information for each parameter value. Further the template creating unit (32) creates a waveform template and a probability template considering the measured another signal waveform and prepares for the next pattern matching. Thus template matching is performed with improved matching accuracy for waveform of a signal varying with the value of a parameter.