Patent №
US 7,199,858
Granted
2007-04-03
Filed 2003
Owner
ASML NETHERLANDS B.V.
Lab
—
AI components
1
planning
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
10705804
A lithographic projection apparatus is disclosed in which a space between the projection system and the substrate is filled with a liquid. An edge seal member at least partly surrounds the substrate or other object on a substrate table to prevent liquid loss when edge portions of the substrate or other object are, for example, imaged or illuminated.
AI classification
Ownership
ASML NETHERLANDS B.V.
assignment · 153140396
Assignors
LOF, JOERI, BUTLER, HANS, HOOGENDAM, CHRISTIAAN ALEXANDER, LOOPSTRA, ERIK ROELOF, BIJLAART, ERIK THEODORUS MARIA, DONDERS, SJOERD NICOLAAS LAMBERTUS, KOLESNYCHENKO, ALEKSEY, MEIJER, HENDRICUS JOHANNES MARIA
On an employer assignment, the assignors are typically the inventors.