PLANAR INERTIAL SENSOR, IN PARTICULAR FOR PORTABLE DEVICES HAVING A STAND-BY FUNCTION
Patent №
US 7,252,002
Granted
2007-08-07
Filed 2004
Owner
STMICROELECTRONICS S.R.L.
Lab
—
AI components
1
hardware
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
10948095
A planar inertial sensor includes a first region and a second region of semiconductor material. The second region is capacitively coupled, and mobile with respect to the first region. The second region extends in a plane and has second portions, which face respective first portions of the first region. Movement of the second region, relative to the first region, in any direction belonging to the plane modifies the distance between the second portions and the first portions, which in turn modifies a value of the capacitive coupling.
AI classification
Ownership
STMICROELECTRONICS S.R.L.
assignment · 155760939
Assignors
ZERBINI, SARAH, MERASSI, ANGELO, LASALANDRA, ERNESTO, VIGNA, BENEDETTO
On an employer assignment, the assignors are typically the inventors.