Patent №
US 7,299,148
Granted
2007-11-20
Filed 2005
Owner
ONWAFER TECHNOLOGIES, INC.
+1 more
Lab
—
AI components
1
planning
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
11177922
This invention seeks to provide methods and apparatus that can improve the accuracy of measured parameter data used for processing workpieces. One aspect of the present invention includes methods of measuring process conditions with low distortion of the measurements caused by the measuring apparatus. The measurements include data for applications such as data for monitoring, controlling, and optimizing processes and process tools. Another aspect of the present invention includes apparatus for measuring substantially correct data for applications such as generating data for monitoring, controlling, and optimizing processes and process tools.
AI classification
Ownership
ONWAFER TECHNOLOGIES, INC.
assignment · 187640061
KLA-TENCOR CORPORATION
merger · 204170596
Assignors
HUNT, DEAN, SPANOS, COSTAS J., WELCH, MICHAEL, POOLLA, KAMESHWAR, FREED, MASON L.
On an employer assignment, the assignors are typically the inventors.